Published in
Elsevier, Materials & Design, (208), p. 109833, 2021
DOI: 10.1016/j.matdes.2021.109833
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Growth of thick [1 1 1]-oriented 3C-SiC films on T-shaped Si micropillars
Journal article published in 2021 by
M. Agati,
S. Boninelli,
C. Calabretta,
F. Mancarella,
M. Mauceri,
D. Crippa,
M. Albani,
R. Bergamaschini,
L. Miglio 
,
F. La Via
,
F. La Via
This paper is made freely available by the publisher.
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