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American Institute of Physics, Applied Physics Letters, 7(104), p. 071912

DOI: 10.1063/1.4866285

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Graphene growth on AlN templates on silicon using propane-hydrogen chemical vapor deposition

This paper is available in a repository.
This paper is available in a repository.

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Abstract

While the integration of graphene on semiconductor surfaces is important to develop new applications, epitaxial graphene has only been integrated on SiC substrates or 3C-SiC/Si templates. In this work, we explore the possibility of growing graphene on AlN/Si(111) templates. Using a chemical vapor deposition process with propane as the carbon source, we have obtained graphitic films (from 2 to 10 graphene layers) on AlN/Si(111) while preserving the morphology of the AlN layer beneath the graphitic film. This study is an important step for the integration of graphene with semiconductors other than SiC.