Published in
American Institute of Physics, Journal of Vacuum Science and Technology A, 1(40), p. 010803, 2022
DOI: 10.1116/6.0001317
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Many routes to ferroelectric HfO<sub>2</sub>: A review of current deposition methods
Journal article published in 2021 by
Hanan Alexandra Hsain 
,
Younghwan Lee ,
Monica Materano ,
Terence Mittmann ,
Alexis Payne ,
Thomas Mikolajick ,
Uwe Schroeder ,
Gregory N. Parsons ,
Jacob L. Jones
,
Younghwan Lee ,
Monica Materano ,
Terence Mittmann ,
Alexis Payne ,
Thomas Mikolajick ,
Uwe Schroeder ,
Gregory N. Parsons ,
Jacob L. Jones
This paper is made freely available by the publisher.
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