Dissemin is shutting down on January 1st, 2025

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American Chemical Society, ACS Applied Electronic Materials, 12(3), p. 5632-5640, 2021

DOI: 10.1021/acsaelm.1c01105

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Hf<sub>1–x</sub>Zr<sub>x</sub>O<sub>2</sub>/ZrO<sub>2</sub> Nanolaminate Thin Films as a High-κ Dielectric

Journal article published in 2021 by Alireza Kashir ORCID, Mehrdad Ghiasabadi Farahani, Stanislav Kamba ORCID, Manoj Yadav, Hyunsang Hwang
This paper was not found in any repository, but could be made available legally by the author.
This paper was not found in any repository, but could be made available legally by the author.

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