Published in
Institute of Electrical and Electronics Engineers, Journal of Microelectromechanical Systems, 2(31), p. 186-193, 2022
DOI: 10.1109/jmems.2021.3137928
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SAW Filters With Excellent Temperature Stability and High Power Handling Using LiTaO<sub>3</sub>/SiC Bonded Wafers
Journal article published in 2022 by
Junyao Shen 
,
Sulei Fu ,
Rongxuan Su,
Huiping Xu,
Zengtian Lu,
Qiaozhen Zhang,
Fei Zeng ,
Cheng Song,
Weibiao Wang,
Feng Pan
,
Sulei Fu ,
Rongxuan Su,
Huiping Xu,
Zengtian Lu,
Qiaozhen Zhang,
Fei Zeng ,
Cheng Song,
Weibiao Wang,
Feng Pan
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