Published in

Elsevier, Thin Solid Films, 1-2(467), p. 104-111

DOI: 10.1016/j.tsf.2004.03.021

Links

Tools

Export citation

Search in Google Scholar

Phase evolution of sol–gel prepared Pb(Zr0.3Ti0.7)O3 thin films deposited on IrO2/TiO2/SiO2/Si electrodes

Journal article published in 2004 by D. Van Genechten, G. Vanhoyland, J. D'Haen, J. Johnson, D. J. Wouters, M. K. Van Bael ORCID, H. Van den Rul, J. Mullens, L. C. Van Poucke
This paper was not found in any repository, but could be made available legally by the author.
This paper was not found in any repository, but could be made available legally by the author.

Full text: Unavailable

Green circle
Preprint: archiving allowed
Upload
Red circle
Postprint: archiving forbidden
Red circle
Published version: archiving forbidden
Policy details
Data provided by SHERPA/RoMEO

Abstract

We report on the microstructural analyses, by means of X-ray diffraction (XRD), scanning electron microscopy combined with energy dispersive X-ray analysis (SEM-EDX) and cross-section transmission electron microscopy (X-TEM), of chemically prepared Pb(Zr0.3Ti0.7)O-3 thin films deposited on IrO2 substrates. The purpose of this study is to detail temperature and time dependence of the lead zirconate titanate (PZT) film microstructure on this type of conductive oxide substrate, partly through a comparison with identically processed PZT films deposited on Pt substrates. It was observed that PZT 30/70 films on IrO2 bottom electrodes, fired at temperatures up to 620 degreesC, are not single phase, due to extensive lead losses during the processing. The IrO2 substrate was found to be indirectly responsible for these losses. Nevertheless, good ferroelectric properties were measured (P-r was 50 muC/cm(2) for the 620 degreesC film). Based on the observed morphology and texture with increasing annealing time, a mechanism for phase evolution in sol-gel-derived PZT 30/70 films on IrO2 substrates is proposed. (C) 2004 Elsevier B.V. All rights reserved.