American Institute of Physics, Journal of Applied Physics, 10(131), p. 105701, 2022
DOI: 10.1063/5.0078805
Full text: Unavailable
An experimental study is conducted in which the subgap trap density of states (DoS) is measured by ultrabroadband photoconduction (UBPC) to examine hydrogen incorporation into the channel layer of top-gate amorphous indium gallium zinc oxide (a-IGZO) thin-film transistors (TFTs). UBPC reveals that hydrogen incorporation leads to the creation of a spectrally broad ([Formula: see text] eV FWHM) distribution of electronic states in the bandgap centered at [Formula: see text] eV above the valence band mobility edge and to an increase in valence band tail state density. Concomitantly, drain current–gate voltage transfer curves demonstrate that hydrogen incorporation results in a negative shift in the turn-on voltage. Quantitatively, electronic state densities estimated by UBPC and the turn-on voltage shift are identical. These experimental findings imply that hydrogen acts as a donor in a-IGZO, but that its donor ionization energy is extraordinarily large, i.e., [Formula: see text] eV, inconsistent with that of a normal donor. It is proposed that this anomalous donor behavior is a consequence of the negative-U property of hydrogen in a-IGZO in which hydrogen ionization precedes its incorporation into the lattice network.