Published in
American Chemical Society, Nano Letters, 8(22), p. 3212-3218, 2022
DOI: 10.1021/acs.nanolett.1c04646
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In Situ Ion Counting for Improved Implanted Ion Error Rate and Silicon Vacancy Yield Uncertainty
Journal article published in 2022 by
Michael Titze 
,
Heejun Byeon,
Anthony Flores,
Jacob Henshaw,
C. Thomas Harris,
Andrew M. Mounce,
Edward S. Bielejec
,
Heejun Byeon,
Anthony Flores,
Jacob Henshaw,
C. Thomas Harris,
Andrew M. Mounce,
Edward S. Bielejec
This paper is made freely available by the publisher.
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