Published in
American Physical Society, Physical Review Materials, 4(6), 2022
DOI: 10.1103/physrevmaterials.6.044411
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Atomic layer deposition of yttrium iron garnet thin films
Journal article published in 2022 by
M. Lammel 
,
D. Scheffler ,
D. Pohl ,
P. Swekis ,
S. Reitzig ,
S. Piontek,
H. Reichlova,
R. Schlitz,
K. Geishendorf,
L. Siegl ,
B. Rellinghaus ,
L. M. Eng ,
K. Nielsch,
S. T. B. Goennenwein,
A. Thomas
,
D. Scheffler ,
D. Pohl ,
P. Swekis ,
S. Reitzig ,
S. Piontek,
H. Reichlova,
R. Schlitz,
K. Geishendorf,
L. Siegl ,
B. Rellinghaus ,
L. M. Eng ,
K. Nielsch,
S. T. B. Goennenwein,
A. Thomas
This paper was not found in any repository, but could be made available legally by the author.
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