Published in

American Association for the Advancement of Science, Science Advances, 19(8), 2022

DOI: 10.1126/sciadv.abn2275

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Deep sub-angstrom resolution imaging by electron ptychography with misorientation correction

Journal article published in 2022 by Haozhi Sha ORCID, Jizhe Cui ORCID, Rong Yu ORCID
This paper is made freely available by the publisher.
This paper is made freely available by the publisher.

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Abstract

Superresolution imaging of solids is essential to explore local symmetry breaking and derived material properties. Electron ptychography is one of the most promising schemes to realize superresolution imaging beyond aberration correction. However, to reach both deep sub-angstrom resolution imaging and accurate measurement of atomic structures, it is still required for the electron beam to be nearly parallel to the zone axis of crystals. Here, we report an efficient and robust method to correct the specimen misorientation in electron ptychography, giving deep sub-angstrom resolution for specimens with large misorientations. The method largely reduces the experimental difficulties of electron ptychography and paves the way for widespread applications of ptychographic deep sub-angstrom resolution imaging.