Dissemin is shutting down on January 1st, 2025

Published in

IOP Publishing, Metrologia, 4(59), p. 045014, 2022

DOI: 10.1088/1681-7575/ac7927

Links

Tools

Export citation

Search in Google Scholar

A constant pressure flowmeter for extreme-high vacuum

This paper is made freely available by the publisher.
This paper is made freely available by the publisher.

Full text: Download

Green circle
Preprint: archiving allowed
Orange circle
Postprint: archiving restricted
Red circle
Published version: archiving forbidden
Data provided by SHERPA/RoMEO

Abstract

Abstract We demonstrate operation of a constant-pressure flowmeter capable of generating and accurately measuring flows as low as 2 × 10−13 mol s−1. Generation of such small flows is accomplished by using a small conductance element with C ≈ 50 nl s−1. Accurate measurement then requires both low outgassing materials ( < 1 × 1 0 − 15 mol s−1) and small volume changes ( ≈ 70 μl). We outline the present flowmeter’s construction, detail its operation, and quantify its uncertainty. The type-B uncertainty is < 0.2 % (k = 1) over the entire operating range. In particular, we present an analysis of its hydraulic system, and quantify the shift and uncertainty due to the slightly compressible oil. Finally, we compare our flowmeter against a NIST standard flowmeter, and find agreement to within 0.5% (k = 2).