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American Chemical Society, Chemistry of Materials, 13(34), p. 6142-6154, 2022

DOI: 10.1021/acs.chemmater.2c01304

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Shuffling Atomic Layer Deposition Gas Sequences to Modulate Bimetallic Thin Films and Nanoparticle Properties

Journal article published in 2022 by Matthias Filez ORCID, Ji-Yu Feng, Matthias M. Minjauw ORCID, Eduardo Solano ORCID, Nithin Poonkottil ORCID, Michiel Van Daele ORCID, Ranjith K. Ramachandran, Chen Li ORCID, Sara Bals ORCID, Hilde Poelman ORCID, Christophe Detavernier ORCID, Jolien Dendooven ORCID
This paper is made freely available by the publisher.
This paper is made freely available by the publisher.

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