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Elsevier, Microelectronic Engineering, 7-9(86), p. 1592-1595

DOI: 10.1016/j.mee.2009.03.048

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Molecular beam epitaxy passivation studies of Ge and III-V semiconductors for advanced CMOS

This paper is available in a repository.
This paper is available in a repository.

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Abstract

status: published