Published in
Springer, Electronic Device Failure Analysis, 4(9), p. 48-51, 2007
DOI: 10.31399/asm.edfa.2007-4.p048
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MEMS Device Failure Analysis: Simulation and the Road Ahead
Journal article published in 2007 by
Colin Drummond 
This paper is made freely available by the publisher.
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Abstract
Abstract This column explains how simulation tools and materials life data can provide a new level of productivity for engineers involved in forensic analysis of MEMS devices.