Published in
2022 6th IEEE Electron Devices Technology & Manufacturing Conference (EDTM), 2022
DOI: 10.1109/edtm53872.2022.9798048
Institute of Electrical and Electronics Engineers, IEEE Journal of the Electron Devices Society, (10), p. 907-912, 2022
DOI: 10.1109/jeds.2022.3198138
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BEOL Integrated Ferroelectric HfO₂-Based Capacitors for FeRAM: Extrapolation of Reliability Performance to Use Conditions
Journal article published in 2022 by
R. Alcala 
,
M. Materano ,
P. D. Lomenzo ,
L. Grenouillet ,
T. Francois,
J. Coignus ,
N. Vaxelaire,
C. Carabasse,
S. Chevalliez,
F. Andrieu,
T. Mikolajick ,
U. Schroeder
,
M. Materano ,
P. D. Lomenzo ,
L. Grenouillet ,
T. Francois,
J. Coignus ,
N. Vaxelaire,
C. Carabasse,
S. Chevalliez,
F. Andrieu,
T. Mikolajick ,
U. Schroeder
This paper is made freely available by the publisher.
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