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American Chemical Society, ACS Applied Materials and Interfaces, 37(14), p. 42232-42244, 2022

DOI: 10.1021/acsami.2c11073

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Role of Oxygen Source on Buried Interfaces in Atomic-Layer-Deposited Ferroelectric Hafnia–Zirconia Thin Films

Journal article published in 2022 by Hanan Alexandra Hsain ORCID, Younghwan Lee, Suzanne Lancaster ORCID, Monica Materano ORCID, Ruben Alcala, Bohan Xu ORCID, Thomas Mikolajick ORCID, Uwe Schroeder ORCID, Gregory N. Parsons ORCID, Jacob L. Jones ORCID
This paper is made freely available by the publisher.
This paper is made freely available by the publisher.

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