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American Chemical Society, Chemistry of Materials, 19(34), p. 8946-8958, 2022

DOI: 10.1021/acs.chemmater.2c02292

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Atomic Layer Deposition of Ruthenium Dioxide Based on Redox Reactions between Alcohols and Ruthenium Tetroxide

Journal article published in 2022 by Nithin Poonkottil ORCID, Matthias M. Minjauw ORCID, Andreas Werbrouck ORCID, Stefano Checchia, Eduardo Solano ORCID, Mikko Nisula ORCID, Alexis Franquet, Christophe Detavernier ORCID, Jolien Dendooven ORCID
This paper is made freely available by the publisher.
This paper is made freely available by the publisher.

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