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American Chemical Society, ACS Applied Nano Material, 10(5), p. 14759-14770, 2022

DOI: 10.1021/acsanm.2c03074

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Focused Ion Beam vs Focused Electron Beam Deposition of Cobalt Silicide Nanostructures Using Single-Source Precursors: Implications for Nanoelectronic Gates, Interconnects, and Spintronics

This paper is made freely available by the publisher.
This paper is made freely available by the publisher.

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