Published in
2022 Smart Systems Integration (SSI), 2022
DOI: 10.1109/ssi56489.2022.9901437
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High-resolution projection lithography for MEMS-applications using thick photoresist AZ 10XT
Proceedings article published in 2022 by
Sebastian Schermer,
Christian Helke,
Danhe Song,
Danny Reuter,
Harald Kuhn 
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