Elsevier, Sensors and Actuators A: Physical, 1(132), p. 90-97
DOI: 10.1016/j.sna.2006.04.043
Full text: Download
A complete vector-2D integrated microsensor system for magnetic field measurement is proposed. The system consists of a micro-integrated fluxgate magnetometer with front-end electronic circuitry based on second-harmonic detection. The magnetic core of the sensor is realized with the VITROVAC 6025X deposited over the micro-integrated coils with the dc-magnetron sputtering deposition process. The sensor realized shows a linearity error of about 1.15% of the full scale in the range of +/- 50 mu T with a sensitivity of 0.45 mV/mu T. (c) 2006 Elsevier B.V. All rights reserved.