Published in
American Chemical Society, Inorganic Chemistry, 43(61), p. 17248-17255, 2022
DOI: 10.1021/acs.inorgchem.2c02835
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Mixed-Substituted Single-Source Precursors for Si<sub>1–x</sub>Ge<sub>x</sub> Thin Film Deposition
Journal article published in 2022 by
Benedikt Köstler 
,
Felix Jungwirth ,
Luisa Achenbach,
Masiar Sistani,
Michael Bolte ,
Hans-Wolfram Lerner ,
Philipp Albert,
Matthias Wagner ,
Sven Barth
,
Felix Jungwirth ,
Luisa Achenbach,
Masiar Sistani,
Michael Bolte ,
Hans-Wolfram Lerner ,
Philipp Albert,
Matthias Wagner ,
Sven Barth
This paper is made freely available by the publisher.
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