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American Chemical Society, Inorganic Chemistry, 43(61), p. 17248-17255, 2022

DOI: 10.1021/acs.inorgchem.2c02835

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Mixed-Substituted Single-Source Precursors for Si<sub>1–x</sub>Ge<sub>x</sub> Thin Film Deposition

Journal article published in 2022 by Benedikt Köstler ORCID, Felix Jungwirth ORCID, Luisa Achenbach, Masiar Sistani, Michael Bolte ORCID, Hans-Wolfram Lerner ORCID, Philipp Albert, Matthias Wagner ORCID, Sven Barth ORCID
This paper is made freely available by the publisher.
This paper is made freely available by the publisher.

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