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American Chemical Society, ACS Applied Electronic Materials, 11(4), p. 5191-5198, 2022

DOI: 10.1021/acsaelm.2c00824

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Controlling the Wet-Etch Directionality in Nanostructured Silicon

Journal article published in 2022 by Zainul Aabdin ORCID, Tanmay Ghosh ORCID, Antoine Pacco, Sanoj Raj, Hue Thi Bich Do, Khakimjon Saidov ORCID, Tjiu Weng Weei, Utkarsh Anand ORCID, Petr Král ORCID, Frank Holsteyns, Michel Bosman ORCID, Utkur Mirsaidov ORCID
This paper is made freely available by the publisher.
This paper is made freely available by the publisher.

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