Published in
American Chemical Society, Chemistry of Materials, 2023
DOI: 10.1021/acs.chemmater.2c02947
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Bimolecular Reaction Mechanism in the Amido Complex-Based Atomic Layer Deposition of HfO<sub>2</sub>
Journal article published in 2023 by
Giulio D’Acunto 
,
Roman Tsyshevsky,
Payam Shayesteh,
Jean-Jacques Gallet ,
Fabrice Bournel ,
François Rochet ,
Indiana Pinsard,
Rainer Timm ,
Ashley R. Head ,
Maija Kuklja,
Joachim Schnadt
,
Roman Tsyshevsky,
Payam Shayesteh,
Jean-Jacques Gallet ,
Fabrice Bournel ,
François Rochet ,
Indiana Pinsard,
Rainer Timm ,
Ashley R. Head ,
Maija Kuklja,
Joachim Schnadt
This paper is made freely available by the publisher.
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