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Published in

Optica, Optics Express, 2(31), p. 1103, 2023

DOI: 10.1364/oe.478613

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Embedded racetrack microring resonator sensor based on GeSbSe glasses

Journal article published in 2023 by Zhiyong Li, Cheng Hou, Ye Luo, Wei Zhang ORCID, Lan Li ORCID, Peipeng Xu ORCID, Tiefeng Xu
This paper is made freely available by the publisher.
This paper is made freely available by the publisher.

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Abstract

In this article, a compact racetrack double microring resonator (MRR) sensor based on Ge28Sb12Se60 (GeSbSe) is investigated. The sensor device consists of a racetrack microring, an embedded small microring, and a strip waveguide. Electron beam lithography (EBL) and dry etching are used to fabricate the device. The compact racetrack double MRR device are obtained with Q-factor equal to 7.17 × 104 and FSR of 24 nm by measuring the transmission spectrum. By measuring different concentrations of glucose solutions, a sensitivity of 297 nm/RIU by linear fitting and an intrinsic limit of detection (iLOD) of 7.40 × 10−5 are obtained. It paves the way for the application of chalcogenide glasses in the field of biosensing.