Published in
Springer, Journal of Materials Science: Materials in Electronics, 6(34), 2023
DOI: 10.1007/s10854-023-09945-z
Links
Tools
SiGe Fin field effect transistor (FET) with STI liner skipping and channel passivation engineering
Journal article published in 2023 by
Chun Li,
Yongliang Li 
,
Anlan Chen,
Fei Zhao,
Jun Luo,
Wenwu Wang
,
Anlan Chen,
Fei Zhao,
Jun Luo,
Wenwu Wang
This paper is made freely available by the publisher.
Full text: Download
Published version:
archiving forbidden
Data provided by 