Chalcogenide Letters, 2(17), p. 41-47, 2020
We investigated Ge2Sb2Te5 thin films annealed at the temperatures specific to the crystallization process using transmission electron microscopy. The annealing temperatures typical for the inflection point (168 °C) of the temperature dependence of resistivity and at the end of the crystallization process (183 °С) were chosen for the TEM studies. These studies clearly showed that the inflection point on the temperature dependence of resistivity is identified with a two-stage character of Ge2Sb2Te5 thin films crystallization.