Published in
Elsevier, Surfaces and Interfaces, (46), p. 104014, 2024
DOI: 10.1016/j.surfin.2024.104014
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New class of Zr precursor containing boratabenzene ligand enabling highly conformal wafer-scale zirconium dioxide thin films through atomic layer deposition
Journal article published in 2024 by
Mohd Zahid Ansari 
,
Petr Janicek ,
Sook NamGung,
Hyangil Kim,
Dip K. Nandi,
Taehoon Cheon,
Masoom Raza Siddiqui,
Muhammad Imran,
Yujin Jang ,
Jong-Seong Bae,
Tae Eun Hong,
Chaehyun Park,
Yeseul Son,
Sang Bok Kim,
Soo-Hyun Kimj
,
Petr Janicek ,
Sook NamGung,
Hyangil Kim,
Dip K. Nandi,
Taehoon Cheon,
Masoom Raza Siddiqui,
Muhammad Imran,
Yujin Jang ,
Jong-Seong Bae,
Tae Eun Hong,
Chaehyun Park,
Yeseul Son,
Sang Bok Kim,
Soo-Hyun Kimj
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