American Institute of Physics, Applied Physics Letters, 3(123), 2023
DOI: 10.1063/5.0157177
Full text: Unavailable
We present broadband on-chip resonators based on SiGe graded-index waveguides operating in the long-wave infrared spectral range from 7.5 to 9.0 μm wavelength range. A quality factor up to 105 has been measured, while an intrinsic quality factor of 1.13 × 105 has been extracted from the measurements. Thermal tuning of the phase in the micro-ring has been used to overcome the limitation of the experimental setup in terms of spectral resolution. These results pave the way toward the development of integrated frequency comb operating in the long-wave infrared range.