Dissemin
Language
العربيّة
Deutsch
English
Español
Suomi
Français
한국어
Македонски
Português
Português Brasileiro
Русский
Svenska
Türkçe
简体中文
繁體中文
Login
Dissemin
Guillaume Gerbaud
Gerbaud, 2007
Links
ORCID
Tools
Export citation
×
Format
BibTeX
@article{Gerbaud2007, author = {Gerbaud, Guillaume}, month = {jan}, title = {Nanoporous SiwOxCyHz thin film deposited by plasma as low k for microelectronics}, year = {2007} }
Export citation
Search in Google Scholar
Nanoporous SiwOxCyHz thin film deposited by plasma as low k for microelectronics
Journal article published in 2007 by
Guillaume Gerbaud
This paper was not found in any repository; the policy of its publisher is unknown or unclear.
Full text:
Unavailable
Preprint
: policy unknown
Upload
Postprint
: policy unknown
Upload
Published version
: policy unknown
Upload