A first series of single cell cavities underwent the "Nitrogen Infusion" treatment at DESY. Samples, which were in the furnace together with the cavities, underwent a series of SEM/EDX measurements and showed some unexpected structures. In parallel, the cavity performance deteriorated after the treatment. The furnace pressure and temperature and the residual gases during the treatment were analyzed and the possible cause for the deterioration has been found. Steps to prevent this deterioration in following treatments are discussed and first results are shown.