Published in

American Institute of Physics, AIP Advances, 6(11), 2021

DOI: 10.1063/5.0045684

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Low loss and dispersion engineered ZnSe waveguides at telecom wavelengths

This paper is made freely available by the publisher.
This paper is made freely available by the publisher.

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Abstract

We have successfully fabricated a dispersion engineered ZnSe waveguide. The ZnSe film was deposited on a CaF2 substrate by radio frequency magnetron sputtering, and the waveguide was patterned directly on the ZnSe films by UV lithography and inductively coupled plasma etching. The nonlinear coefficient in the 4-μm-width waveguide was calculated to be 0.73 w−1 m−1 for both TE and TM modes at 1.55 µm. The loss of the ZnSe rib waveguides was measured to be 4.3 dB/cm at 1550 nm using the cut-back method.