Published in

American Institute of Physics, Applied Physics Letters, 22(121), 2022

DOI: 10.1063/5.0129920

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III-nitride vertical hot electron transistor with polarization doping and collimated injection

This paper was not found in any repository, but could be made available legally by the author.
This paper was not found in any repository, but could be made available legally by the author.

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Abstract

III-nitride-based hot electron transistors (HETs) offer a significant promise as high-speed, high-power devices, but their performance has been limited to below that of competing technologies. Here, we report on a HET with current density > 440 kA/cm2 and common-emitter current gain >20. Polarization engineering of the emitter stack was used to allow for high-current collimated electron injection from the emitter with relatively low turn-on voltage. The use of only polarization charge in the undoped 10 nm-thick base allowed for high gain through minimization of scattering with atomic layer etching contact fabrication used to lower base access resistance.