AbstractLarge-area, programmable assembly of diverse micro-objects onto arbitrary substrates is a fundamental yet challenging task. Herein a simple wafer-level micro-assembly technique based on the light-triggered change in both surface topography and interfacial adhesion of a soft photo-sensitive polymer is proposed. In particular, the light-regulated polymer growth creates locally indented and elevated zones on the stamp surface. The light-mediated adhesion reduction, on the other hand, facilitates the inks to be released from the polymer. The interplay of these two effects makes it feasible for the programmable assembly of ultra-small components onto various substrates coated with supplementary adhesive layers. The fidelity of this technique is validated by assembling diverse materials and functional devices, with the printing size up to 4-inch. This work provides a rational strategy for large-scale and programmable assembly of diverse delicate micro-objects, bypassing the common issues of some existing techniques such as poor transfer uniformity, small printing area, and high cost.