Springer Nature [academic journals on nature.com], Light: Science and Applications, 1(12), 2023
DOI: 10.1038/s41377-023-01198-z
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AbstractDeep neural network can greatly improve tomography reconstruction with limited data. A recent effort of combining ptycho-tomography model with the 3D U-net demonstrated a significant reduction in both the number of projections and computation time, and showed its potential for integrated circuit imaging that requires high-resolution and fast measurement speed.