Published in
Elsevier, Materials Today Chemistry, (32), p. 101650, 2023
DOI: 10.1016/j.mtchem.2023.101650
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Low-temperature ALD of highly conductive antimony films through the reaction of silylamide with alkoxide and alkylamide precursors
Journal article published in 2023 by
S. He 
,
A. Bahrami ,
X. Zhang ,
J. Julin ,
M. Laitinen,
K. Nielsch
,
A. Bahrami ,
X. Zhang ,
J. Julin ,
M. Laitinen,
K. Nielsch
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