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Royal Society of Chemistry, Materials Advances, 13(2), p. 4316-4322, 2021

DOI: 10.1039/d1ma00204j

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Plastic strain relaxation and alloy instability in epitaxial corundum-phase (Al,Ga)<sub>2</sub>O<sub>3</sub> thin films on r-plane Al<sub>2</sub>O<sub>3</sub>

This paper is made freely available by the publisher.
This paper is made freely available by the publisher.

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Abstract

The growth of (AlxGa1−x)2O3 alloy thin films in the corundum phase on r-plane (01.2) Al2O3 substrates is investigated.