Published in
Elsevier, Acta Materialia, (239), p. 118220, 2022
DOI: 10.1016/j.actamat.2022.118220
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Impact of oxygen content on phase constitution and ferroelectric behavior of hafnium oxide thin films deposited by reactive high-power impulse magnetron sputtering
Journal article published in 2022 by
Samantha T. Jaszewski 
,
Eric R. Hoglund ,
Anna Costine,
Marc H. Weber ,
Shelby S. Fields,
Maria Gabriela Sales ,
Jaykumar Vaidya,
Leah Bellcase,
Katie Loughlin,
Alejandro Salanova ,
Diane A. Dickie ,
Steven L. Wolfley ,
M. David Henry ,
Jon-Paul Maria,
Jacob L. Jones
and other authors.
,
Eric R. Hoglund ,
Anna Costine,
Marc H. Weber ,
Shelby S. Fields,
Maria Gabriela Sales ,
Jaykumar Vaidya,
Leah Bellcase,
Katie Loughlin,
Alejandro Salanova ,
Diane A. Dickie ,
Steven L. Wolfley ,
M. David Henry ,
Jon-Paul Maria,
Jacob L. Jones
and other authors.
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