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Royal Society of Chemistry, Nanoscale Advances, 17(4), p. 3549-3556, 2022

DOI: 10.1039/d2na00175f

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Low temperature 2D GaN growth on Si(111) 7 × 7 assisted by hyperthermal nitrogen ions

This paper is made freely available by the publisher.
This paper is made freely available by the publisher.

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Abstract

As the characteristic dimensions of modern top-down devices are getting smaller, such devices reach their operational limits imposed by quantum mechanics.