Terbium gallium garnet (Tb₃Ga₅O₁₂, TGG) crystal can be used to fabricate various magneto-optical devices due to its optimal Faraday effect. In this work, 400-keV He⁺ ions with a fluence of 6.0 × 10¹⁶ ions/cm² are irradiated into the TGG crystal for the planar waveguide formation. The precise diamond blade dicing with a rotation speed of 2 × 10⁴ rpm and a cutting velocity of 0.1 mm/s is performed on the He⁺-implanted TGG planar waveguide for the ridge structure. The dark-mode spectrum of the He⁺-implanted TGG planar waveguide is measured by the prism-coupling method, thereby obtaining the relationship between the reflected light intensity and the effective refractive index. The refractive index profile of the planar waveguide is reconstructed by the reflectivity calculation method. The near-field light intensity distribution of the planar waveguide and the ridge waveguide are recorded by the end-face coupling method. The He⁺-implanted and diamond blade-diced TGG crystal planar and ridge waveguides are promising candidates for integrated magneto-optical devices.