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American Chemical Society, ACS Photonics, 8(9), p. 2623-2633, 2022

DOI: 10.1021/acsphotonics.1c01973

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Deep Learning-Based Prediction of Fabrication-Process-Induced Structural Variations in Nanophotonic Devices

Journal article published in 2022 by Dusan Gostimirovic ORCID, Dan-Xia Xu, Odile Liboiron-Ladouceur, Yuri Grinberg
This paper is made freely available by the publisher.
This paper is made freely available by the publisher.

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