Published in
AIP Publishing LLC, APL Photonics, 11(6), p. 116106, 2021
DOI: 10.1063/5.0065210
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Silicon photonic beam steering module with backside coupling elements toward dense heterogeneous integration with drive electronics
Journal article published in 2021 by
X. Chen 
,
F. Meng,
S. A. Fortune,
A. J. Compston,
M. Ebert,
X. Yan,
H. Du,
M. Banakar,
D. T. Tran,
C. G. Littlejohns ,
D. J. Thomson,
R. Nicolaescu,
G. T. Reed
,
F. Meng,
S. A. Fortune,
A. J. Compston,
M. Ebert,
X. Yan,
H. Du,
M. Banakar,
D. T. Tran,
C. G. Littlejohns ,
D. J. Thomson,
R. Nicolaescu,
G. T. Reed
This paper is made freely available by the publisher.
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