Dissemin is shutting down on January 1st, 2025

Published in

AIP Publishing LLC, APL Photonics, 11(6), p. 116106, 2021

DOI: 10.1063/5.0065210

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Silicon photonic beam steering module with backside coupling elements toward dense heterogeneous integration with drive electronics

This paper is made freely available by the publisher.
This paper is made freely available by the publisher.

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