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Wave phenomena and instabilities in direct current magnetron sputtering and high power impulse magnetron sputtering plasmas

Book chapter published in 2016 by Christian Maszl ORCID, Ante Hecimovic, Jan Benedikt, Achim von Keudell
This paper was not found in any repository; the policy of its publisher is unknown or unclear.
This paper was not found in any repository; the policy of its publisher is unknown or unclear.

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