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Luc Stafford
Khanna et al., 2007
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@inproceedings{Khanna2007, author = {Khanna, R. and Lim, W. T. and Stafford, L. and Pearton, S. J. and Park, J.-S. and Song, J.-I. and Heo, Y.-W. and Lee, J.-H. and Kim, J.-J.}, month = {jan}, title = {High-density plasma etching of RF-sputtered indium-zinc-oxide films in Ar, Ar/Cl2, and Ar/CH4/H2 chemistries}, year = {2007} }
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High-density plasma etching of RF-sputtered indium-zinc-oxide films in Ar, Ar/Cl2, and Ar/CH4/H2 chemistries
Proceedings article published in 2007 by
R. Khanna
,
W. T. Lim
,
L. Stafford
,
S. J. Pearton
,
J.-S. Park
,
J.-I. Song
,
Y.-W. Heo
,
J.-H. Lee
,
J.-J. Kim
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