Published in
Wiley, Surface and Interface Analysis, 5(53), p. 482-493, 2021
DOI: 10.1002/sia.6936
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Parameters synergism in the preparation of TiN(100) transition layer with high structural integrity on Si(100): First‐principles calculations and experimental investigations
Journal article published in 2021 by
Yang Wang 
,
Weihua Wang,
Guoyang Shu,
Shishu Fang,
Bing Dai ,
Jiaqi Zhu
,
Weihua Wang,
Guoyang Shu,
Shishu Fang,
Bing Dai ,
Jiaqi Zhu
This paper is made freely available by the publisher.
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