Published in
American Institute of Physics, Journal of Vacuum Science and Technology B, 1(39), p. 012802, 2021
DOI: 10.1116/6.0000645
Links
Tools
Lithium source for focused ion beam implantation and analysis
Journal article published in 2021 by
Michael Titze 
,
Daniel L. Perry,
Elizabeth A. Auden,
Jose L. Pacheco,
John B. S. Abraham,
Edward S. Bielejec
,
Daniel L. Perry,
Elizabeth A. Auden,
Jose L. Pacheco,
John B. S. Abraham,
Edward S. Bielejec
This paper was not found in any repository, but could be made available legally by the author.
Full text: Unavailable
Data provided by 