Published in
Elsevier, Journal of the European Ceramic Society, 6(41), p. 3397-3403, 2021
DOI: 10.1016/j.jeurceramsoc.2020.12.053
Links
Tools
Thermal conductivity of plasma-enhanced atomic layer deposited hafnium zirconium oxide dielectric thin films
Journal article published in 2021 by
Jihyun Kim,
Sungje Lee,
Yiwen Song 
,
Sukwon Choi ,
Jihwan An,
Jungwan Cho
,
Sukwon Choi ,
Jihwan An,
Jungwan Cho
This paper was not found in any repository, but could be made available legally by the author.
Full text: Unavailable
Published version:
archiving forbidden
Data provided by 