Published in
Springer, Journal of Materials Science: Materials in Electronics, 2(32), p. 1659-1667, 2021
DOI: 10.1007/s10854-020-04935-x
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Optimization of the pulsed laser deposition process of In2O3 thin films for ferroelectric field effect device applications
Journal article published in 2021 by
Meng Xu,
Lei Guo,
Jian-Min Yan,
Zhi-Xue Xu,
Hui Wang,
Guan-Yin Gao,
Ren-Kui Zheng 
This paper is made freely available by the publisher.
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