Published in
IOP Publishing, Semiconductor Science and Technology, 3(36), p. 035007, 2021
Links
Tools
Stress control in thick AlN/c-Al2O3 templates grown by plasma-assisted molecular beam epitaxy
Journal article published in 2020 by
Oleg A. Koshelev 
,
Dmitrii V. Nechaev ,
Pavel N. Brunkov ,
Sergey V. Ivanov,
Valentin N. Jmerik
,
Dmitrii V. Nechaev ,
Pavel N. Brunkov ,
Sergey V. Ivanov,
Valentin N. Jmerik
This paper is made freely available by the publisher.
Full text: Download
Published version:
archiving forbidden
Data provided by 