Published in

Optica, Optics Letters, 3(46), p. 677, 2021

DOI: 10.1364/ol.412529

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Nanometallic antenna assisted amorphous silicon waveguide integrated bolometer for mid-infrared

This paper was not found in any repository, but could be made available legally by the author.
This paper was not found in any repository, but could be made available legally by the author.

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Abstract

Bolometers are thermal detectors widely applied in the mid-infrared (MIR) wavelength range. In an integrated sensing system on chip, a broadband scalable bolometer absorbing the light over the whole MIR wavelength range could play an important role. In this work, we have developed a waveguide-based bolometer operating in the wavelength range of 3.72–3.88 µm on the amorphous silicon (a-Si) platform. Significant improvements in the bolometer design result in a 20 × improved responsivity compared to earlier work on silicon-on-insulator (SOI). The bolometer offers 24.62% change in resistance per milliwatt of input power at 3.8 µm wavelength. The thermal conductance of the bolometer is 3.86 × 1 0 − 5 W / K , and an improvement as large as 3 orders magnitude may be possible in the future through redesign of the device geometry.