Patterning and control of the nanostructure in plasma thin films with acoustic waves: mechanicalvs.electrical polarization effects
Journal article published in 2021 by
Aurelio García-Valenzuela,
Armaghan Fakhfouri 
,
Manuel Oliva-Ramírez,
Victor Rico-Gavira,
Teresa Cristina Rojas,
Rafael Alvarez,
Siegfried B. Menzel,
Alberto Palmero,
Andreas Winkler ,
Agustín R. González-Elipe
,
Manuel Oliva-Ramírez,
Victor Rico-Gavira,
Teresa Cristina Rojas,
Rafael Alvarez,
Siegfried B. Menzel,
Alberto Palmero,
Andreas Winkler ,
Agustín R. González-Elipe
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Abstract
Plasma thin film deposition assisted with acoustic waves renders a patterned structure due to sheath ions local bombardment effects.